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In_xGa_1-xAs/GaAs应变超晶格的X射线双晶衍射研究

X-Ray Double-Crystal Diffraction Study of In_xGa_1-xAs/GaAs Strained-Layer Superlattice

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【Author】 Chen Jingyi/Shanghai Institute of Metallury, Academia Sinica Shanghai, 200050, ChinaZhu Nanchang/Shanghai Institute of Metallury, Academia Sinica Shanghai, 200050, ChinaTian Liangguang/Shanghai Institute of Metallury, Academia Sinica Shanghai, 200050, ChinaLi Runshen/Shanghai Institute of Metallury, Academia Sinica Shanghai, 200050, China

【机构】中国科学院上海冶金研究所；中国科学院上海冶金研究所上海；上海；上海；

【摘要】本文阐述了一种基于X射线动力学衍射理论的计算机模拟方法,该方法可用于分析超晶格材料的X射线双晶摆动曲线,用模拟计算方法得到了In_xGa_1-xAs/GaAs应变超晶格的各种结构参数。更多还原

【Abstract】 A computer simulation method based on X-ray dynamical diffraction theory is presented.The method is used for the analysis of X-ray double-crystal rocking curves of superlattices,The structure parameters of the In_xGa_1-xAs/GaAs strained-layer superlattice is obtained fromthe simulation of the rocking-curve.更多还原