【摘要】 本文研究了多晶硅应变膜压力传感器制作技术,提出了防止多晶硅应变膜变形的工艺条件,研制出了多晶硅应变膜压力传感器。这一技术简单、与IC工艺较为兼容,适合研制集成压力传感器。更多还原

【Abstract】 The fabrication techniques for polysilicon-diaphragm pressure sensors were studied.Theprocess conditions for making undeformed polysilicon-diaphragm were suggested, and polysilicon-diaphragm pressure sensors were made. The technology is simple, and has better process compatibilitywith current IC technology. Therefore, it sutits to the fabrication of integrated pressuresensors.更多还原