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SiO膜作为光控晶闸管减反射膜的研究

A Study of a SiO Thin Film for an Antireflecting Film of a Light Triggered Thyristor

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【作者】 赵善麒; 高鼎三; 潘福泉;

【Author】 Zhao Shanqi;Gao Dingsan;Pan Fuquan Dep. of Electronics Science, Jilin University Dep. of Electronic Engineering, Shenyang Polytechnic University

【机构】 吉林大学电子科学系; 吉林大学电子科学系; 沈阳工业大学电子系;

【摘要】 为了提高光控晶闸管的触发灵敏度,我们在器件的受光区表面蒸镀上一层 SiO 减反射膜。本文在理论上指出了 SiO 膜作为减反射膜所必须满足的条件,并在实验上对 SiO 膜的减反射效果进行了验证,结果表明:SiO 膜的存在可使透射率由无膜时的0.68提高到0.94~1,光触发功率比无膜时减小了20~40%。

【Abstract】 In order to improve light triggering sensitivity of a light triggered thyris- tor,a SiO antireflecting film is evaporated on the light sensitive gate area.In this paper,the condition in which a SiO film will make the antireflecting film,is th- eoretically indicated,and the effect of antireflection of the SiO film is experimen- tally tested and verified.The experimental results have shown that the transmissivity has increased from 0.68 to 0.94~1 and the light triggering power has decreased by 20~40%,utilizing the SiO antireflecting film.

  • 【文献出处】 半导体光电 ,Semiconductor Optoelectronics , 编辑部邮箱 ,1990年01期
  • 【被引频次】3
  • 【下载频次】43
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