【摘要】 使用Monte Carlo方法模拟350keVXe~+注入Cu/Ti双层结构,研究界面所造成的离子浓度分布的不连续性,并讨论界面位置对浓度分布的影响。在模拟600keV Bi注入Al/Ti双层结构时,当考虑有界面势存在,则其理论值与实验值符合得更好。更多还原

【Abstract】 The incontinuity of disttibution of ion concentratation is studied in this paper as using the Montc Carlo Method to simulate Cu-Ti bilayer films implanted with 350 keV Xe~+. And we discuss the distribution of ion concentration depending on the interface position. In the case of the simulation of Al-Ti bilayer films implanted with 600 keV Bi~+, the theoretical value is fairly coincides with the experimental value when the presenee of the interface potential is considered.更多还原