【摘要】 该器件采用电晕预电离技木,只要调换工作气体和相应的反射镜,就可以分别作为 TEA CO₂激光器、N₂激光器和 XeCl 准分子激光器。文中对器件结构和工作特性进行了讨论。更多还原

【Abstract】 The corona pre-ionized technique has been applied to TE multifunction gas laser.If gas in the laser and reflecting mirrors are changed,the device can become TEA CO₂ laser,N₂laser or Xecl excimer laser.The structure and characteristics of the laser have been described inthis paper.更多还原