【摘要】 本文对三种不同纯度的硅粉在加压氮气（～1MPa）中进行氮化研究。实验表明:在1250～1370℃1h 内硅粉可快速氮化反应生成氮化硅,主要晶相为β-Si₃N₄。硅粉快速氮化时,存在一个临界氮气压力,临界压力大小与硅粉本身表面特性有关,采用适当的工艺参数可快速制备高质量的α-SiN₄粉末。更多还原

【Abstract】 The nitriding of three kinds of silicon powders has been studied.The resultsshow that silicon nitride powders can be synthesized by quickly nitriding siliconpowders in the temperature range 1250-1370℃,for 1h,but its crystalline phasemainly consists of β-Si₃N₄·There is a critical pressure existing for the nitridingof silicon powders,and its value depends on the surface characteristics of thesilicon powders.High quality α-Si₃N₄ powders can be made quickly by selectingoptimum conditions of nitriding silicon powders.更多还原