【摘要】 高能离子轰击金属表面产生的辐照损伤,使晶格点阵发生严重畸变,并产生微观应力,因而在微观上表现为衍射线形的展宽。基于这种实验现象,本文通过衍射线形的高斯曲线拟合,提出了一种表征离子注入金属表面硬化程度的新参量Gp。实验表明,参量Gp随离子注入剂量的增加而增大。当剂量达到一定量级时,Gp值下降。这说明一旦超过临界剂量,表面硬化机理发生变化。此外,根据晶格畸变与硬度之间的平行关系,初步建立了参量Gp与表面硬度之间的对应关系,从而使用参量Gp可快速无损地估计离子注入金属的表面硬度。更多还原

【Abstract】 In the process of ion implantation-bombardment, metal surface will produce a great, lattice distortion and microstress.So that metal surface is hardened and its X-Ray diffraction line will be broaden in diffraction profile. Upon this experimental regulation, a new parameter Gp, which stands for the hardening degree of metal surface, has been proposed by X-ray diffraction line using a Gaussian Curve Fitting method.The experiment show that the Gp increase with increasing the ion fluence, but Gp will decrease when the ion fluence attains a vertical value.This show that the hardening mechanism of implantation layer creates change again above the vertical fluence.Furthermore, a parallel relationship between the surface hardness and the Gp has been hold primarily.Hence, the use of the parameter Gp allows a rapid and nondestructive estimation of hardness of ion implantation into metals.更多还原