【摘要】 利用半导体激光器线性调频技术制成了新型的外差干涉仪。分析了干涉仪的测量原理、动态范围及精确度,测量了压电陶瓷的电压-位移曲线。更多还原

【Abstract】 A prototype heterodyne interferometer is made using frequency-modnlated diode laser. This paper analyses the principle, dynamic range and resolution of the measurement of this interferometer. The displacement of PZT versus voltage applied to it has been measured.更多还原