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用电镜测定银簿膜的厚度

The Measurement of Thickness of a Thin Silver Film by Electron Microscope

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【作者】 金太权;

【Author】 Jin Taiquan The Basic Science Department

【机构】 吉林工学院基础科学系;

【摘要】 本文详细讨论了利用电镜测定银薄膜厚度的原理和方法.主要内容有,电子对银的散射截面的计算和薄膜厚度与电子束的相对电流密度关系的计标.

【Abstract】 This paper has discussed in detail the principle and method of measuring the thickness of a silver film by means of an electron microscope. The majar topics discussed are: calculation of the electron scattering cross-section and the relationship between the thickness of the film and the relative intensity of the electronic beam.

【关键词】 电子显微镜; 测定; 薄膜; 厚度;
【Key words】 electron microscopes; determination; thin films; thickness;
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