【摘要】 重点介绍PtSi肖脱基势垒红外焦平面光腔的介质生长技术及介质的折射率和介质层厚度对PtSi肖脱基势垒探测器性能的影响,发现适当的合金条件和减薄PtSi层厚度有利于提高探测器的量子效率,背面增加抗反射层能减少红外辐射在入射界面的能量损失.更多还原

【Abstract】 Some experiments on optimization of the optical cavity in PtSi Schottky barrier FPA have been oarried out with emphasis on the growth technique of the dielectric layers and effects of the refractive index and layer thickness on the performances of the PtSi Schottky barrier detectors. It is found that proper heat treatment and reduction of PtSi layer thickness will favour the quantum yield of the detectors. Moreover, adding an antireflective layer to the back side of the detector will reduce the radiation energy loss on the incident interface.更多还原