【摘要】 用质子弹性散射法研究了316L不锈钢中注入的氦。在77—673K温区,30—170keV能区完成了不同剂量(10¹⁶—3×10¹⁷/cm²)的He注入。当靶温≤RT时,He能被不锈钢有效地捕获且最大浓度随剂量的增加而线性增加。在给定的剂量下,当靶温较高时,被捕获的He的数量Q随温度增加而减少,这意味着在较高的温度下注He,同时有He的再发射发生。比较不同靶温下注He得到的He分布可以看出:注入时He的捕获和迁移强烈依赖于靶温。更多还原

【Abstract】 Implanted He in SS316L has been studied by means of proton elastic scattering. He ions were implanted with energies of 30-170 keV and doses of 1016-3×1017/cm2 at temperatures of 77-673 K. At RT and below that, it is found that He is efficiently trapped and the maximum concentration CHe increases linearly with the dose. At higher temperature Q, the total amount of trapped He decreases with increasing temperature for a given dose. This implies that He re-emission has to be taken into account at higher temperature. A comparison of He depth profiles for various target temperatures suggests that the He trapping and mobility during implantation are dependent on the temperature.更多还原