【摘要】 一种含浸电极型液态金属离子源已经获得发展。该种离子源应用烧结多孔钨“尖端”。研究了能应用于含浸电极型液态金属离子源的各种低熔点合金,并成功地引出了Si、Ge和Sb离子,测定了基本离子源参数,如电流—电压特性、质谱分析和离子源引出束工作寿命。更多还原

【Abstract】 An impregnated-electrode-type liquid metal ion source has been developed in which a sintered porous tungsten tip is used. The purpose of the present investigatin is to fabricate eutectic alloys which can be used in impregnated-clectrode-type liquid metal ioa source. Si, Ge and Sb ions have been obtained and basic parameters of the ion source Such as current-voltage characteristics, mass spectra and lifetime have been measured.更多还原