【摘要】 稳产高产复制高精度圆光栅是满足国内日趋扩大的需求量的唯一途径。本文就如何稳产高产复制高精度圆光栅的主要工艺因素作了详细分析,并提出了达到上述指标的方法。更多还原

【Abstract】 Photocopy of high precision circular gratings with high and stable yields is the only way to meet the domestic needs which increase gradually. In this paper the technology factors, which influence the photocopy with high and stable yields, are analysed in detail, and the methods to reach the high and stable yields are as put forward.更多还原