【摘要】 利用化学喷雾沉积法（CSD法）在未定向的ZrO₂单晶衬底上获得了零电阻温度高于85 K和转变宽度为2 K、厚度小于5 μm的YBa₂Cu₃O_7-δ超导薄膜.以XRD、XPS和SEM等手段研究了不同制备条件下薄膜的晶体结构、电子结构和显微形貌,讨论了材料膜形成机制及其与超导电性的关系。更多还原

【Abstract】 High Tc superconduction YBa2Cu3O76 thin film with zero resistivity temperature higher than 85 K and transition width of 2 K and thickness of 5 μm,on a substrate of crystal cubic ZrO2, was obtained by using Chemical Spray Deposition (CSD) process. XRD, XPS and SEM etc. were employed to investigate the crystallographic structure, electron structure and micro-morphology of films made under different conditions. The formation mechanism of YBa2Cu3O7δ, thin film and relation with superconductivity are discussed.更多还原