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垂直磁化膜微畴结构的SEM观察
SEM Observation on Micro Domain Structure of Magnetic Films with Perpendicular Magnetization
【摘要】 本文研究了用扫描电子显微镜(SEM)观察垂直磁化膜微畴结构的方法和观察结果。该方法的步骤是在试样表面制作高质量的干粉纹图,然后用高倍率二次电子象进行观察。由于SEM中的二次电子象具有景深大、分辨率高的特点,这项技术可用来研究磁畴的精细结构特征及其在磁化过程中的变化。
【Abstract】 In this paper, 0bservational method and results on micro domain Structure of magnetic films with perpendicular magnetization have been studied in SEM. The methodical procedure includes that preparing a good dry Bitter pattern on the films surface and then observing by second electron image(SEI)with high resolution. Because SEI possesses large depth of focus and high resolution, this technique can be applied to study micro domain structure and its change in magnetization process.
- 【文献出处】 电子显微学报 ,Journal of Chinese Electron Microscopy Society , 编辑部邮箱 ,1989年03期
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