【摘要】 目前低压扫描电镜已得到发展,相应地低压电子探针定量分析也需要发展。本文用NBS的Cu—Au合金、GaAs、GaP和InP等标样,对三种商用EDS (EDAX9100,TN5500和Kevex8000)在5～30 kev下的无标样定量分析结果进行了比较,指出了提高低压电子探针定量分析准确性需要解决的问题。更多还原

【Abstract】 At present, the low voltage scanning electron microscopy has been developed. Consequently the low voltage electron probe quantitative analysis isalso needed to develope. In this paper there are three kinds of standardless quantitative analysis results obtained from the commercial EDAX 9100. TN5500 and KEVEX8000 EDS at 5-30kV. The Cu-Au alloy of NES. GaAs. GaP and InP are used as standard samples. The problems which must be solved to improve the accuracy of low Vohage electron probe quantitative analysis are pointed out.更多还原