【摘要】 本文给出了以WF₆或WCl₆为钨源,以硅烷或氯硅烷为硅源的硅化钨气相淀积体系的热力学研究结果。结合实验,讨论了热力学结果对实验的指导和局限。更多还原

【Abstract】 This paper presents the result of thermodynamic study on Chemical Vapor Deposition (CVD) tungsten silicide system using WF6 or WCl6 as tungsten source and silane or chloride as silicon source. The direction for experimental research and the limitation of the thermodynamic result are discussed by combining with experimental results.更多还原