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热电子增强活化离子镀Al防护膜的究
An Investigation on Themtionic Enhanced Activated Ion Plating Al Protective Film
【摘要】 在DML—500A离子镀设备中使用热电子发射电极以增强离子化,通过使用这种技术获得致密度更高,质量更好的A1膜,这种A1膜特别适合于保护永久磁铁。
【Abstract】 A thermionic emission electrode has been used in DML-500A ion plating unit to enhance ion plating. The Al films with more density and better quality have been formed by using such a technique and are especially suitable for protecting permanent magnet.
【关键词】 活化离子镀；
- 【文献出处】 材料保护 ,Materials Protection , 编辑部邮箱 ,1989年02期
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