【摘要】 用X衍射测定了离子束混合所形成铂硅化物的衍射线宽,并计算出了其晶粒大小.发现混合时的注入剂量和后退火温度都会影响其晶粒大小.更多还原

【Abstract】 By using the X-ray diffraction, the line width of the platinum silicide formed by ion beam mixing is investigated and its grain-size is calculated. It is found that both the dose of ion beam mixing and the postannealing temperature can influence the grain-size.更多还原