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重掺Ⅲ-Ⅴ族化合物半导体载流子浓度的光测法研究
Research on Optical Measurement of Carrier Concentration of Heavily-Doped III-V Compound Semiconductors
【摘要】 本文应用计算机,绘出各类重掺Ⅲ-Ⅴ族化合物半导体在不同等离子频率ωp下的反射率曲线,从中找出了反射谱的高低频反射边在反射率极小值处所对应的频率ω1与ω2之和与ωp间的函数关系.并应用此关系对不同载流子浓度的重掺Ⅲ-Ⅴ族化合物半导体GaAs和Inp样品进行实验上的验证,获得了满意的结果.
【Abstract】 Reflectivity curves of several kinds of heavily-doped III-V compound semiconductors aredrawn in different plasma frequency ωp using computer simulation.The relation between ω,and the sum of ω1 and ω2 is found, where ω1 and ω2 are frequencies of the high-and low-frequ-ency reflection edge on reflection spectra at the positions of reflectivity minima. Heavily-do-ped GaAs and InP with different carrier concentrations are tested using this method and theresult is satisfactory.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1989年12期
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