【摘要】 文章报道了a-Si∶H在石英,SiO₂/Si,WSi₂/Si和Al/Si四种不同衬底上激光结合的结果.更多还原

【Abstract】 The laser crystallization of a-Si:H on different substrates was carried out.High qualitycrystallized films have been obtained on fused quartz,but not on SiO₂/Si substrates because ofthe generation of bubbles and holes.For crystallization on WSi₂/Si, a higher power must besupplied and grain size is not large enough.On Al/Si,regular liquid crystallization can not beobtained up to the temperature of melting point of Al.更多还原