【摘要】 本文论述了涡轮分子泵压缩级叶轮对分子泵抽速的影响,并导出了它们之间的解析关系式。然后,论证了泵的抽速与被抽气体分子量关系中的驼峰,以及抽速随转速升高而“S”型增加等现象均是由于分子泵中采用了两种或者两种以上抽速不相等的叶轮造成的。最后,还给出了确定分子泵吸气级叶轮级数的方法。更多还原

【Abstract】 The effects of outlet stage on the pumping speed of turbomolecular pumps (TMP) are discussed, and some useful formulas are deduced.In a commercial TMP, two or more kinds of discs with different pumping specd are adopted. This is the only factor wich causes the hump and "S" shape in the curves of pumping speed vs. molecular weight of pumped gases and rotating speed of the pumps, respectively.Finally, a method used to determine the number of discs of inlet stage of TMP is given.更多还原