【摘要】 <正> 一、前言国内唯一的一台标准磁控管型H~-离子源已在1983年完成了桌上试验研究,达到了预期的指标。试验中发现,该源按弧功率估算应能引出更多的H~-束流(>50mA),H~-束流的引出除受该装置引出电压(<18kV)的限制外,阴极表面利用系数低也限制了H~-束流的引出,为提高源的效率,引用了阴极-阳极引出狭缝形状聚焦技术,试制了一个带半圆更多还原

【Abstract】 An asymmetric magnetron H~- source with grooved cathode is built toreplace a standard-magnetron H~- source. This new cathode has a semi-cylindrical groove and its height is reduced so that the cathode-anode spacing in the back of the source increased from 1 mmto 3.6 mm. This leads to an improvement by a factor of three to four inreducing arc power, which depend on the utilization factor of the cathode area.In addition, arc starting was easier than the standard magnetron H~--source. Less influence of the arc current fluctuation and the deviation from thegrooved cathode-anode extracting slit are observed. Also, it is showed gas efficiencyis improved in our source. A new discharge arc chamber and the experimental results on the desk test ofthis device are reported in detail.更多还原