【摘要】 用Du Mond图解法分析了利用双晶衍射术测量晶片曲率半径的原理.提出了利用（n^v,-n^s）排列,仅用Ka₁辐射测量晶片曲率半径的方法.此方法与通常所采用的（n^s,-n^s）排列,Ka₁,Ka₂双线法相比,灵敏度大大提高,可测量的曲率半径提高了一个量级.利用（n^v,-n^s）排列双晶衍射术测量了硅单晶片经As⁺离子注入后产生的微小弯曲形变.更多还原

【Abstract】 The Dumond graphic method is employed in the analysis of crystal curvature radius measurement. A new method for measuring the curvature radius using the (nv,-ns) double-crystal diffractometry with Ka1 spectrum only is proposed. This method is much more sensitive than the usually used (ns,-ns) double-crystal diffractometry with the Ka doublet method. The detectable limit of curvature can be improved about one order of magnitude. The curvature radius of the Si crystal after As+ ion implantation is measured by (nv,-ns) double-crystal diffractometry.更多还原