【摘要】 本文提出了一种适用于离子源及分析仪器的低量限气体流量计,并进行理论分析,指出了粘滞流的工作模式;描述了流量计的结构和给出了实验结果.理论分析计算与实验基本符合.本流量计选用毛细管为感受器,并经皂膜法标定.具有最小可检量低(2.8×10^-5Pa·m³/s,即1大气压ml/h),并可方便地连续测量的特点.压差显示器采用套管式结构,能防止显示液外溢和污染真空系统.最后给出了两个应用实例,测量了潘宁“Penning”型和考夫曼“Kaufman”型离子源的气体耗量.更多还原

【Abstract】 A Iow detectable-limit, capillary gas flowmeter has been developed for ion sources and analytical instruments. This paper describes the design and construction of the meter and makes a theoretical analysis. The theoretical model is well consistent with the experimental results. There are many conspicuous features for the meter; lower detectable limit (1 atm. ml/hr), convenience for use, continuous measurement, high accuracy and reliability. It has been calibrated with soap-film method and thimbletube type display is adopted for it. Finally, two application examples are given. The gas throughput in Penning and Kaufman type ion sources are measured under the operation condition.更多还原