【摘要】 本文介绍,当a-SiN_x:H层的厚度一定,a-Si:H层的厚度不同时,a-Si:H/a-SiN_x:H超晶格薄膜的光吸收系数、光学禁带宽度以及折射率随之变化的规律。更多还原

【Abstract】 In this paper, the optical absorption coefficient, optical gap and the index of refraction of a-Si:H/a-SiN_x:H superlattice films were studied as a function of a-Si:H sublayer thickness with a-SiN_x:H sublayer thickness being kept constant.更多还原