【摘要】 本文报道7—8MeVl⁴⁺离子弹性反冲法（ERD）分析固体中H的深度分布。实验和理论分析表明,近表面处的深度分辨率为200—300A。探讨了散射几何条件和入射能量等的最佳化问题。比较了同一样品用F离子ERD法与6.4MeV ¹H(¹⁹F,αγ)¹⁵O核反应法（NRA）的测试结果。表明F离子ERD法是快速（5—10min）、低辐照（5—10μC）、深度分辨和灵敏度较好的分析固体中H的深度分布的一种方法。更多还原

【Abstract】 Depth profiling of hydrogen in solids has been performed by Elastic Recoil Detection （ERD） with multicharged F ions at a 1.7 MV Tandem accelerator. Both experimental and theoretical analysis show the depth resolution of about 200-300 A in the near-surface regions of solids. The optimization of the experimental conditions such as scattering geometry and incident beam energy are discussed. The comparison of ERD with multicharged F ions and ¹H(¹⁰F,αγ)16O resonance reaction at 6.4 MeV for the same samples demonstrated that hydrogen profiling by ERD with F ions is a fast and economic method with low radiation damage and perfect depth resolution.更多还原