【摘要】 用喷涂法制备的掺锑SnO₂膜,其方块电阻可达～15Ω/□,在可见光区的光透过率达85—92％。XPS和AES剖面分析表明:该膜的表面存在约15（?）的富氧区和约50（?）的富氯区,而其内部是均匀的SnO₂多晶结构。更多还原

【Abstract】 The square resistance R□ of antimony doped SnO2 films prepared by means of che-mical spray reaches about 15 Ω/ □. Its light transmitance in visible range is between 85%-922%. The results from XPS and AES profile analysis show that an about 15 A oxygen-rich layer and a 50 A chlorine-rich layer exist at the surface of films, while uniform SnO2 polycrystalline structure exists inside the films.更多还原