【摘要】 建立了铝与不锈钢两个平面磁控靶溅射系统。反应溅射沉积了一组SS-C复合材料、α-C:H与Al-C-F均匀薄膜。运用椭偏仪-分光光度计法确定了上述薄膜在太阳光谱范围(0.35—2.5μm)内的光学常数谱值(?)(λ)=n(λ)-ik(λ)。 对多层膜系的模型用计算机进行优化设计与计算。实验表明,溅射沉积Al-C-F/变渐SS-C/Al选择性吸收表面,其反射率谱值与计算出的最佳谱值基本一致,太阳吸收率α≈0.96,法向发射率ε_n≈0.06(80℃)。经真空中450℃烘烤1小时,该表面的光学性能基本没有变化。这种优质表面用于玻璃真空集热管有良好的前景。更多还原

【Abstract】 The planar magnetron sputtering sysytem with two targets of aluminium and stainless steel has been constructed. A set of SS-C composite materials, λ-C: H, and Al-G-F homogeneous films have been prepared using reactive sputtering technology. The optical constants, n(λ) = n(λ)-ik(λ). of the above homogeneous films are determined by combining ellipsometer with spectrophtometer techniques in the solar spectral range (0.35-2.5 to).The optimization of solar selective surfaces is made with assist of the multilayer stack model by means of computer. The calculated reflectances of the produced Al-C-F/ graded SS-C/A1 selective absorbing surface based on measured optical constants are good in agreement with experiments. The selective absorbing surface has absorptance α≈0.96 and normal emittance εn≈0.06 (80℃) . Negligible deterioration occurs during about lhr at 450℃ in vacuum. Therefore, the sputtered selective absorbing surface has good prospects for all-glass evacuated collector tubes.更多还原