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HDY-1型扫描电子显微镜灰度等级测试仪

The HDY-1 SEM Gray Level Tester

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【作者】 胡问国宋红江陈尔纲

【Author】 Hu Wenguo;Song Hongjiang;Chen Ergang Electron-Ion Institute,Physis Department Yunnan University

【机构】 云南大学云南大学

【摘要】 本文介绍了一种新研制的“HDY-1型扫描电子显微镜(简写为SEM)灰度等级测试仪”(简称HDY-1型测试仪)。它可以方便地连接到任何一台SEM上使用,可以实现下述功能:1.连接它以后,SEM可以象没有连接时一样使用;2.用它可以试测SEM扫描显示系统的质量,测定其显示灰度等级的能力;3.可以在样品图像上“加注”一列灰度等级比较标尺,便于用户比较图像中所含灰度等级数,提高所拍样品图像的质量;4.可以方便地把灰度等级比较标尺转换成灰度级别测量尺,即通过信号处理及时-空转换把既不准确,又不客观的二度空间的灰度比较测量转换为一度空间上的既客观而又准确的长度测量。这一点是国外同类仪器所没有的,这是HDY-1测试仪的特点。

【Abstract】 A newly designed tester known as HDY-1, which can test the gray level display powerof a scanning electron microscope (i,e. SEM), is described in this paper. The HDY-1 tester canbe made as an accessory and can easily be interfaced to any kind of SEM, The functions of itare given as folllows: 1) The interfacing of HDY-1 and SEM does not affect the normal conditonof the SEM; 2) It can estimate the quality of the display system of the SEM, and test thegray level display power of the SEM: 3) It can add a standard gray level on the SEM imagepicture, which can help the user to estimate the distinct gray levels in the SEM image and toimprove the quanlity of the SEM image picture; 4) Using signal processing technique and time-space transformating technique, it can change the standard gray levels inio a scale conveniently,so the subjective and inaccurate measuremnt of the gray levels in a two dimension image isreplaced by an objective and accurate one dimensional length measurement.

  • 【文献出处】 分析测试通报 ,Journal of Instrumental Analysis , 编辑部邮箱 ,1988年02期
  • 【下载频次】19
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