【摘要】 本文报导了一种实用型准分子激光器及其实验结果。该器件采用了闸流管开关、气体横向循环系统、C-C能量转移快放电回路以及具有自动预电离的紧凑的腔体结构,同时还采用了高反射率高破坏阈值光学膜片,装备了气体净化处理器和镜片防污保护系统。该器件单脉冲能量为260mJ以上,最大平均功率超过20W,最高重复率为130次/秒,一次充气工作寿命远远超过10~6次。更多还原

【Abstract】 A practical excimer laser and its performance are described. This excimer laser consists of a compact cavity with automatic preionization, a transverse gas eirculating system, a C—C energy transfer circuit using thyratron as a HV switch, a gas processing loop and a window protection system.The materials are anticorrosive if necessary. Owing to a mirror of high reflectivity and high damage threshold, the pulse energy is beyond 260mJ,the maximum average power of over 20W, the highest repetition rate of 130pps and the lifetime of fuel gas well above 10~6 pulses.更多还原