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电视技术在微小尺寸测量中的应用

Application of TV Technique in the Measurement of Micro-Dimension

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【作者】 章恩耀; 孙培懋; 李隆一;

【Author】 Zhang En-yao,Sun Pei-mao and Li Long-yi

【机构】 清学大学; 吉林光学机械厂;

【摘要】 本文介绍由光学显微镜、电视摄象系统和微处理机组合而成的BCM5-1T型电视测量显微镜。采用高频脉冲计数、光标测量区域指定、自动阈值、系统非线性的计算机数字补偿等技术措施,实现了在较大视场范围内微小尺寸的高精确度测量。

【Abstract】 -This paper presents a TV measuring microscope of Model BCM5-1T which consists mainly of an optical microscope, a TV camera system and a microprocessor. Some techniques are used in this apparatus, such as high-frequency pulse count, measuring range indication by cursor, auto-threshold as well as digital nonlinea-rity compensation by computer. So the micro-dimensional measurement on a large vie-wing field can be realized with high accuracy.

  • 【文献出处】 计量学报 ,Acta Metrologica Sinica , 编辑部邮箱 ,1988年02期
  • 【下载频次】23
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