【摘要】 <正> 近来许多人已用电子束蒸发、激光加热蒸发、分子束外延、溅射法等方法制成了YBaCuO超导薄膜。但上述方法都需要比较昂贵的镀膜设备,而且不易准确控制膜的成份,重复性差。本文采用简单的喷雾沉积法,在ZrO₂单晶衬底上制备出Tc（onset）=95K,Tc（R=0）=87K的YBa₂Cu₃O_7-x超导薄膜。 1.用Y₂O₃,BaCO₃,CuO为原料,按Y:Ba:Cu=1:2:3的比例混合后倒入硝酸更多还原

【Abstract】 The superconducting thin films of YBa₂Cu₃O_7-x with thickness 3～5μm were prepared on ZrO₂ single crystal substrates by spray deposition technique. The thin films obtained by appropriate annealing treatment are textured with c axis predominantly normal to the film plane and give T_c （onset）=95K and T_c （R = 0） = 87K.更多还原