【摘要】 报道了一个与Nicolet 200SXV傅里叶变换光谱仪联用的可同时测定半导体样品中浅施主和浅受主杂质浓度的实验装置,介绍了用该装置同时测定硅样品中杂质硼和磷浓度的实验。更多还原

【Abstract】 An experimental set-up combined with a Nicolet 200SXV Fourier transform spectrometer used for simultaneous determination of concentrations of both shallow acceptors and donors in semiconductor samples under the illumination of an external light beam (h_v≥E_g)is reported. As an example, the concentrations of both boron and phosphorus impurities in silicon have been simultaneously measured using this set-up.更多还原