【摘要】 用剖面制样技术对在150K、293K、373K温度下Ar离子束混合的Au/Si界面层进行了透射电镜研究,获得不同深度的一些结构细节。更多还原

【Abstract】 A cross section electron microscopy was used to reexamine the structure of ion beam mixed Au/Si bilayers. The mixing was carried out with 150-300 keV Ar ion beams for dose (2-5.6)× 106/cm2. Target temperature ranged from 150 to 373K. Some information on the fine structure at interfacial layers were obtained.更多还原