【摘要】 本文提出了测试平面衍射光栅的分辨特性的新方法,用干涉法测量光栅衍射的波阵面的相位,得出衍射波阵面的三维波面图,并用所取得的相位数据作傅里叶变换求得其在谱面上的光谱衍射斑——光谱线像的强度分布,并可据此确定半宽度值和分辨极限.文中叙述了这一新方法的优点、基本原理和实验方法,并给出应用这方法测量一批光栅所得结果中的两个例子,结果表明,与通常所用直接扫描光谱线法所测结果相符合.更多还原

【Abstract】 This paper presents a novel method for evaluating the resolution of a plane diffraction grating. The phase of wavef ront diffracted oy a grating under test is measured with interferometry and a graph of 3D)-shape of the diffracted wavef ront is obtained. The the Fourier transform is carried out by the algorithm of FFT and the intensity distribution in spectral diffraction pattern and the half width of the spectral image are determined. The advantages, fundamental principle and the experimental technique of this novel method are described, the results of experiments and computation are presented too. They are in good agreement with the result obtained by the method commonly used.更多还原