【摘要】 本文介绍了镍-碳多层膜软X光反射镜的设计与制造方法,特别是膜厚监控法.用俄歇谱仪分析了一个样品的剖面情况;对一些样品在1.54(?)的衍射特性和在软X光区的反射率进行了测量并与理论计算结果作了比较.更多还原

【Abstract】 In thia paper we described the design and preparation method of Ni-0 multilayer soft X-ray mirrors with emphasis on the thickness monitoring method. The optical coefficients of Ni and C superficial layers at 6328 A are determined by ATR method and so their thicknesses could be monitored by measuring the transmittanoe of the sample at that wavelength during deposition. The depth profile of a sample was analyzed with AES; the diffraction performance at 1.54A and the reflectivities at soft X-ray region of some samples were measured and oompared with the theoreticalcalculations.更多还原