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用准光波导方法测量聚合物薄膜光学参数
Parameter measurement of polymer thin film with quasi-waveguide method
【摘要】 本文报道用准光波导方法测量了沉积在棱镜底面上的聚苯乙烯和聚醚砜薄膜,确定了这两种聚合物薄膜的折射率和薄膜厚度.并用偏振光测定了其双折射.薄膜折射率测量误差为±1×10-3,薄膜厚度测量误差为±0.01μm.
【Abstract】 A new experiment for measuring the parameters of polystyrene and polyether-sulphone films using quasi-waveguide method is reported. The films were deposited on the gubstrats with the shape of prism. Leaky mode m-lines of the films were measured. The index and the thickness of the films were determined by using leaky mode equation. The birefringence of the film was obtained with the aid of different polarized laser beam. The measurement errors of the index and thickness are about ±1×10-3, and ±0.01μm respectively.
- 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,1988年04期
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