【摘要】 本文所介绍的硅温度计是在P型硅片上注磷而成的。这种温度计具有尺寸小、热容低、反应快、灵敏度高等特点,其测温范围可从1.5K到100K,在4.2K的复现性为±0.02K。更多还原

【Abstract】 A low temperature silicon thermometer prepared with phosphorous ion-importation into P-type silicon slice is reported. The thermometer has the advantages of small size, low heat capacity, fast response and high sensitivity. It can be used within a temperature range from 1.5K to 100K. The reproducibility at 4.2K is±0.02K.更多还原