【摘要】 本文简要地介绍了离子镀膜设备的几种型式,并对真空电弧离子镀膜的设备和蒸发源作了重点的叙述。此外对离子注入、离子束混合、动态离子束混和和离子辅助镀膜的最新发展也作了介绍,并对设备的发展提出了几点看法。更多还原

【Abstract】 Modern ion beam induced surface modification techniques are reviewed including conventional ion plating,ion plating with vacuum arc source,ionimplantation,ion beam mixing,dynamic recoil mixing and ion assisted deposition.更多还原