【摘要】 本文介绍了一个系列光刻物镜,即标准倍率为-1倍、-1/4倍、-1/5倍和-1/10倍设计中的问题和解决途径,最后给出设计结果的调制传递函数MTF曲线.更多还原

【Abstract】 In this paper, We described a series microlithographic lenses with magnification of 1, 5:1 and 10:1 . At the same time, we described problems of optical design and methods to solve them. At last, we gave MTF curves of design results.更多还原