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蓝紫光范围灵敏的GaAs/Ga0.55Al0.45As异质结光晶体管

GaAs/Ga0.55Al0.45As Heterojunction Phototransistors with High Sensitivity to Blue-Light

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【作者】 黄小康; 孙宝寅; 孙成城; 薛保兴; 张培荣;

【Author】 Huang Xiaokang/Department of Radio Electronics,Tsinghua University,BeijingSun Baoyin/Department of Radio Electronics,Tsinghua University,BeijingSun Chengcheng/Department of Radio Electronics,Tsinghua University,BeijingXue Baoxing/Department of Radio Electronics,Tsinghua University,BeijingZhang Peirong/Department of Radio Electronics,Tsinghua University,Beijing

【机构】 清华大学无线电电子学系; 清华大学无线电电子学系 北京; 北京; 北京 国家自然基金委员会;

【摘要】 本文在对异质结光晶体管的光电流注入进行理论分析的基础上,采用选择性腐蚀工艺,制出了在蓝紫光波段灵敏的GaAs/Ga0.55Al0.45As异质结光晶体管,其光谱响应范围为小于4000A到8800A.峰值响应波长为5500A.4000A处的相对响应约为30%,其绝对响应度优于 70μA/μW.

【Abstract】 Based on a theoretical analysis on the currents in heterojunction phototransistors,GaAs/Ga0.55Al0.45As HPTs with high sensitivity to blue-light are made using selective eaching techni-que.The response spectrum ranges from below 4000 A to 8800 A. The relative response as4000 A is about 30% and the responsibility at it is over 70μA/μW.

【关键词】 异质结; 光晶体管; 光电探测器;
【Key words】 Heterojunction; Phototransistor; Photodetector;
  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1988年04期
  • 【被引频次】1
  • 【下载频次】21
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