【摘要】 本文介绍一种考夫曼型高能宽束强流离子源,它的最高引出电压可达100kV,最大引出束流25mA。可使用氩、氮、氢、氧及一氧化碳等多种气态物质作为工质。在使用氩、氮等非腐蚀性气体工作时,阴极连续工作寿命约为100h。引出束流的束径在0.65m,下游靶区约为100mm。束流稳定性<±3%/h。可用于料材表面进行大面积注氮和进行离子束混合及其它表面改性研究。更多还原

【Abstract】 This paper describes a kind of kaufman type high energy broad beam intense current ion source. The highest extraction voltage is 100kV, and the maximum extraction beam is 25mA. It can work with many kind of gases, such as nitrogen, argon, hydrogen, oxygen and carbon monoxide with good results. The life time of the eathod is about 100h. for non-corrosive gases. The spot diameter of the extracted beam current is about 100mm with a target located 65mm downstream of the source. The drift of beam current is less than ±3%per h. This ion source is well suitable to nitrogen ion implantation of large surfaces for improving the tribological properties of the surface and for ion beam mixing as well as for studying other surface modifications.更多还原