【摘要】 <正> 一、引言离子注入在半导体工业、金属材料改性的研究,特别是在大规模集成电路的研制中得到了广泛的应用。我们这台离子源是为中流强离子注入机研制的,它的设计指标是:1.气、固两用离子源,固体工作温度为250-800℃。2.分析后接收¹¹B⁺≥500μA,横向张角（发散束）α≤±3°,纵向张角（会聚束）β≤±1°。3.在¹¹B⁺=500μA下灯丝寿命为10小更多还原

【Abstract】 The Principle and construction of the Frceman ion source are brieflydescribed. The main experimental results are as follows: the average beamcurrent is 2--3 mA for ⁴⁰Ar⁺ and 500--700 μA for ¹¹B⁺. The maximum beamcurrent is 4.8 mA and 800 μA for ⁴⁹Ar⁺ and ¹¹B⁺ respectively. Divergent angleof transverse and longitudial is±2.1°. and 8.9°respectively. The gas consumptionis 1.5×10⁵ml·Pa/min. The filament life is about 20 hours (¹¹B 500 μA). Theworking temperature ranges from 250 to 800℃.更多还原