【摘要】 本文讨论了最近研制成功的用于光学表面检测的数字波面干涉仪。利用实时位相检测技术可以高精度重构出数字波面,叙述了仪器的光学系统,电子学接口和软件。该仪器可测定光学平面和球面的面形,精度分别达到λ/40和λ/20,由终端输出面形的数据。更多还原

【Abstract】 Describe digital wavefront interferometer recently builded.Basedupon real time phase detecting techniqe can reconstruct wavefront in highaccuracy.Describe the optical system,interface and software of interferometer.For testing plane surfaces and spherical surfaces,it has an accuracy aroundλ/40,λ/20 respectively.The parameters of tested surface display on the ter-minal.更多还原