【摘要】 本文推导了任意形状排列四探针测量小圆形薄片电阻率时同时考虑厚度和半径影响的修正因子表达式:作为特例,计算了直线和方形两种常用的探针排列情况下的修正因子,并用直线四探针对硅单晶片进行实验测量.结果表明所推导的公式可较准确地测量任意厚度小圆形薄片的电阻率.更多还原

【Abstract】 The correction factor equation of four arbitrary array Probes method for resistivity measurement of small thin circle semiconductor materials has been derived, with the affect of the thickness and the radius being put into consideration. In two specific cases of the equation (the in-line four probes and the square array four Probes), the correction factors have been calculated. The calculated results are consistent with the experimental ones.更多还原