【摘要】 本文介绍双(?)PR OM 的关键工艺—熔断丝工艺及其在实际中的应用.研究了NiCr 熔丝的淀积条件、退火特性、与标准STTL 工艺的相容性以及熔丝的编程特性。在此基础上研制了256位双极PROM LT3288,其各项性能指标均达到了设计与使用的要求.更多还原

【Abstract】 This paper gives a report on the keyprocess of bipolar PROM-NiCr fusetechnology,and its application.Manycharacteristics about NiCr fuse,such asdepositing conditions,annealing NiCr pro-cess and compatibility with STTL arestudied.With the technology,LT3288,ahigh performance 256-bits bipolar PROM,has been produced,and all the requiredparameters have been realized.更多还原