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蒸镀ITO薄膜及其光电特性的研究

STUDY ON THE OPTICAL AND ELECTRICAL CHARACTERISTICS OF EVAPORATED ITO FILM

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【作者】 燕子屏

【Author】 Yan Zi-ping (Department of Physics,Neimenggu University)

【机构】 内蒙古大学物理系

【摘要】 本文报道了采用石墨舟蒸发In2O3和SnO2混合物(Wt=10%),获得了电阻率为3×10-4Ω·cm、在可见光范围内透过率大干95%的ITO薄膜。用它制作部分次品多晶硅电池的抗反射膜,其短路电流密度与没有抗反射膜的同样电池相比,提高90.4%,开路电压提高10mV左右。

【Abstract】 In this paper,we report that the use of vacuum evaporation method with a graphite acting as a boat,to obtain ITO film from a mixture of In2O3 and SnO2.The optical and electrical characteristics of ITO film are measured.It is found that the electrical resistivity is 3×10-4 Ω-cm and relative optical transmission efficiency is more than 95% in the range of visible light.Using the ITO film as an antirefraction coating (AR) on some second-class solar cells of polycrystalline silicon,as compared with one and the same no AR solar cell,the average short-current density increase by a factor of 90.4% and the open-voltage raise about 10 mV.

  • 【文献出处】 太阳能学报 ,Acta Energiae Solaris Sinica , 编辑部邮箱 ,1987年04期
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