【摘要】 本文报道了用等离子体增强化学汽相淀积（PECVD）技术淀积TiO₂薄膜,并研究了各种反应条件对薄膜生长的影响。这种TiO₂薄膜对可见光有较高的透光性、将它制成光电极,薄膜具有一定的光电效应,对氢气和酒精有敏感特性。更多还原

【Abstract】 Titanium dioxide (TiO2) films have been fabricated successfully by using plasma-enhanced chemical vapor deposition (PEGVD) method and the effects of reaction factors are discussed in this paper.The in-depth profiles of compositions in the TiO2 films were investigated by means of-Auger electron spectroseo’py and infrared spectra techniques.The structure of the TiO2 films has been,determined by x-ray diffraction method.It shows the temperature of deposjtion arid annealing may influence the structure of the TiO2 films.Scanning electron micrographs of the TiO2-films deposited onto silicon substrates have been given.The TiO2 films fabricated in our laboratory are transparent in visible region and show photovoltaic effect.The resistivity of the films is very sensitive to gas C2H5OH and H2更多还原