【摘要】 本文介绍一种新的由微型机控制的电视扫描IC硅片与掩膜图形自动对准系统,并详细叙述了所建立的去污矩阵和通过数据处理来消除工艺玷污对精度影响的方法,同时提出了失准偏差的矩阵计算公式。该系统的测量灵敏度可达0.08微米。更多还原

【Abstract】 A new micro-computer controlled video auto-alignment system for the alignment between wafer and mask is discussed. A defect-eliminating-matrix is defined and a method of the data processing, with which the effect on measurement accuracy can be eliminated, is described in detail. Moreover, a matrix formula for computing the misalignment is given. The measurement sensitivity of 0.08μm may be achieved.更多还原